Low loss silicon nitride photonics using room-temperature sputtering

Our paper on ultralow loss silicon nitride integrated photonics using room-temperature reactive sputtering was published in Laser & Photonics Reviews. Our study demonstrates the lowest propagation losses achieved with a low temperature deposition method. It is CMOS compatible and can be used for hybrid integration with other photonic and electronic processes. Laser & Photonics Review, 2300642 (2023).