Max Planck Institute for the Science of Light, ErlangenVisit and contact
Del'Haye LabMicrophotonics Research Laboratory

Research

Integrated platforms and fabrication

Our chips are fabricated in our in-house cleanroom. We develop low-temperature, CMOS-compatible deposition of silicon nitride with very low propagation loss, aluminium nitride processing, and design methods for microresonators, including machine-learning prediction of dispersion and sidewall nanostructures.

Draft text, to be reviewed by the group.

Selected publications

  1. Simplified Aluminum Nitride Processing for Low-Loss Integrated Photonics and Nonlinear OpticsH. Yan, S. Zhang, A. Pal, A. Ghosh, A. Alabbadi, M. Kheyri, T. Bi, Y. Zhang, I. Harder, O. Lohse, F. Gannott, A. Gumann, E. Butzen, K. Ludwig, and P. Del’Hayenpj Nanophoton. 3, 13 (Mar 2026)arXiv:2506.22595 (June 2025)
  2. Fourth-harmonic UV light generation in integrated silicon nitride microresonatorsA. Ghosh, A. Pal, H. Yan, T. Bi, L. O. Trinchão, Q. Zhou, G. S. Wiederhecker, S. Zhang, and P. Del'HayearXiv:2603.03255 (Mar 2026)
  3. Visible octave frequency combs in silicon nitride nanophotonic waveguides driven by Ti: sapphire lasersA. Alabbadi, E. Allan, H. Ostapenko, P. Castro-Marin, D. T. Reid, and P. Del'HayearXiv:2601.04047 (Jan 2026)
  4. Inverse-Designed Silicon Nitride NanophotonicsT. Bi, S. Zhang, E. Bostan, D. Liu, A. Paul, O. Ohletz, I. Harder, Y. Zhang, A. Ghosh, A. Alabbadi, M. Kheyri, T. Zeng, J. Lu, K. Yang, and P. Del'HayearXiv:2505.13383(May 2025)
  5. On-chip microresonator dispersion engineering via segmented sidewall modulationM. Kheyri, S. Zhang, T. Bi, A. Pal, H. Zhang, Y. Zhang, A. Alabbadi, H. Yan, A. Ghosh, L. Hill, P. Bianucci, E. Butzen, F. Gannott, A. Gumann, I. Harder, O. Ohletz, and P. Del’HayePhoton. Res. 13, 367 (Jan 2025)
  6. Low-Temperature Sputtered Ultralow-Loss Silicon Nitride for Hybrid Photonic IntegrationS. Zhang, T. Bi, I. Harder, O. Lohse, F. Gannott, A. Gumann, E. Butzen, Y. Zhang and P. Del'HayeLaser & Photonics Reviews, 2300642 (2023)arXiv:2301.10758
  7. Geometry optimization for dark soliton combs in thin multimode silicon nitride microresonatorsY. Zhang, S. Zhang, T. Bi, and P. Del'HayeOpt. Express 31, 41420-41427 (2023)
  8. Machine learning assisted inverse design of microresonatorsA. Pal, A. Ghosh, S. Zhang, T. Bi, and P. Del’HayeOpt. Express 31, 8020-8028 (2023)arXiv:2212.03243

All publications

From the news

Postdoc positions availablePaper on silicon nitride fabrication is among the most viewed papers in LPRShuangyou Zhang is awarded a DFG grantSegmented sidewall modulation for dispersion engineeringLinear and Nonlinear Coupling of Light in Twin-RodsLow loss silicon nitride photonics using room-temperature sputtering